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The AS-One installation for fast thermal processes of RTP buy in Moscow
Buy The AS-One installation for fast thermal processes of RTP
The AS-One installation for fast thermal processes of RTP
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The AS-One installation for fast thermal processes of RTP

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Description

System - AS-One - productions - Annealsys (France) for fast thermal processes with cold walls performed by for plates with a diameter up to-4 inches (100 mm) - and - to 6 inches (150 mm).

Application:
Fast thermal annealing (RTA - - Rapid Thermal Annealing)
Fast thermal oxidation (RTO - Rapid Thermal Oxidation)
CVD - a decanter
CVD - carbon nanotubes
Diffusion, otzhigkontakt
Post-implantation annealing
Annealing of connections of semiconductors
Nitridization, Silitsidirovaniye, Sulfirization and Selenization
Crystallization and Jelling, etc.

Features

  • Fast heat treatment of plates with a diameter of 4" and 6"
  • Compact floor configuration for economy of the place
  • High reliability and low cost of possession
  • Technology of cold walls from stainless steel
  • High reproducibility of process
  • Ultra pure environment and lack of pollution
  • High speed of cooling and low effect of memory
  • The high-vacuum version (10-6 Torr) is available
  • Pyrometer and the thermocouple for control of temperature
  • The fast digital controller of temperature - PID
  • To 5 gas lines
To download the brochure in PDF
To download the presentation in PDF
Temperature range

from room - (RT) - till 1450 ° - C - (depending on the version)

Heating speed Speed of heating is up to 200 ° - C/sec. or to 50 ° - C/sec. with the graphite holder
Cooling Skrorost 50 ° - C/sec. in standard execution and to -100 ° - C/sec. with the special equipment (option)
Gas system An opportunity to mix process gases, - Controllers of a mass consumption of gas
Vacuum from atm. (N at.) to 10-6 Torr with the turbomolecular pump (option)
Control of temperature measurement of temperature the thermocouple and the fast temperature controller - PID - guarantees high and stable temperature control on all range of temperatures
Management the system has management with the personal computer with the software on base - Windows
Options Low-temperature or high-temperature piromert

It is possible to request the offer on - the reference  - or having sent us the letter to the address info@minateh.r
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The AS-One installation for fast thermal processes of RTP
The AS-One installation for fast thermal processes of RTP
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